ISO 14644-13-2017
ISO 14644-13-2017 标准详情
- 标准号：ISO 14644-13-2017
- 中文标题：
- 英文标题：Cleanrooms and associated controlled environments -- Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications
- 标准类别：国际标准化组织ISO
- 发布日期：
内容简介
ISO 14644-13:2017 gives guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. Under consideration are all surfaces (external or internal) that are of intere
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