CEI EN 62047-11 Ed. 1 (2014) 标准详情
- 标准号：CEI EN 62047-11 Ed. 1 (2014)
- 中文标题：
- 英文标题：Semiconductor Devices - Micro-Electromechanical Devices - Part 11: Test Method For Coefficients Of Linear Thermal Expansion Of Free-Standing Materials For Micro-Electromechanical Systems
- 标准类别：意大利电气标准CEI
- 发布日期：
