ASTM F2074-2000 标准详情
- 标准号:ASTM F2074-2000
- 中文标题:测定硅和其他半导体薄片直径的标准指南
- 英文标题:Standard Guide for Measuring Diameter of Silicon and Other Semiconductor Wafers
- 标准类别:美国材料与试验协会ASTM
- 发布日期:2000
This standard was transferred to SEMI (www.semi.org) May 20031.1 This guide defines standardized positions for measuring diameter of circular wafers of silicon and other semiconducting materials that contain flats or notches on the periphery. It was
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