I.S. EN 62047-11-2013
I.S. EN 62047-11-2013 标准详情
- 标准号：I.S. EN 62047-11-2013
- 中文标题：
- 英文标题：Semiconductor Devices - Micro-electromechanical Devices - Part 11: Test Method for Coefficients of Linear Thermal Expansion of Free-standing Materials for Micro-electromechanical Systems (iec 62047-11:2013 (eqv))
- 标准类别：爱尔兰国家标准I.S.
- 发布日期：
内容简介
Describes the test method to measure the linear thermal expansion coefficients (CLTE) of thin free-standing solid (metallic, ceramic, polymeric etc.) micro-electro-mechanical system (MEMS) materials with length between 0,1 mm and 1 mm and width betwe
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