ASTM F574-1988 标准详情
- 标准号:ASTM F574-1988
- 中文标题:评定多晶硅的试验方法
- 英文标题:standard test method for evaluation of polysilicon
- 标准类别:美国材料与试验协会ASTM
- 发布日期:1988
CONTAINED IN VOL 10.05 1997Outlines indirect determination of purity of polysilicon ingots, 60 mm in diameter and larger, for use in growing crystals by Czochralski technique through characterization of single crystals zoned from polysilicon.
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