SEMI F30-1998 标准详情
- 标准号:SEMI F30-1998
- 中文标题:
- 英文标题:Start-up And Verification Of Purifier Performance Testing For Trace Gas Impurities And Particles At An Installation Site
- 标准类别:国际半导体设备与材料协会
- 发布日期:
Verifies the performance of purifiers by using analytical instrumentation in the measurement of gas impurities and particles. It is applicable only to large scale bulk purifiers rated at greater than 50 LPM flowrate. Verification tests are completed
* 特别声明:资源收集自网络或用户上传,本网站所提供的电子文本仅供参考,请以正式出版物为准。仅供个人标准化学习,研究使用。如有侵权,请及时联系我们!