SEMI F1-1996 标准详情
- 标准号:SEMI F1-1996
- 中文标题:规范高纯气体管道系统和部件的泄漏完整性
- 英文标题:SPECIFICATION FOR LEAK INTEGRITY OF HIGH-PURITY GAS PIPING SYSTEMS AND COMPONENTS
- 标准类别:国际半导体设备与材料协会
- 发布日期:1996-01-01
Covers the leak testing requirements and leakage rates for high-purity gas piping systems and components used in semiconductor manufacturing. It is used as an aid for procurement and installation of materials, equipment and services. It is applicable
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