SEMI S28-2011 标准详情
- 标准号:SEMI S28-2011
- 中文标题:
- 英文标题:Safety Guideline For Robots And Load Ports Intended For Use In Semiconductor Manufacturing Equipment
- 标准类别:国际半导体设备与材料协会
- 发布日期:
Specifies a set of performance and design based safety considerations for load ports and wafer handling robots that are intended to be integrated into semiconductor manufacturing equipment (SME).
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