IEC/TS 61945-2000 标准详情
- 标准号:IEC/TS 61945-2000
- 中文标题:集成电路 生产线批准 工艺和失效分析方法
- 英文标题:Integrated circuits - Manufacturing line approval - Methodology for technology and failure analysis
- 标准类别:国际电工委员会标准
- 发布日期:2000-03
GIVES THE METHODOLOGY FOR TECHNOLOGY AND FAILURE ANALYSIS IN MANUFACTURING INTEGRATED CIRCUITS. TECHNOLOGY ANALYSIS IS USED TO DETERMINE THE WAY A COMPONENT IS BUILT BY OBSERVING IT USING ADEQUATE RESOLUTION, WHICH INCREASES PROGRESSIVELY WITH THE LE
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