DIN EN ISO 14644-5-2005 标准详情
- 标准号:DIN EN ISO 14644-5-2005
- 中文标题:洁净室和相关控制环境.第5部分:操作
- 英文标题:Cleanrooms and associated controlled environments - Part 5: Operations (ISO 14644-5:2004); German version EN ISO 14644-5:2004
- 标准类别:德国标准
- 发布日期:2005-03
This part of International Standard ISO 14644 specifies basic requirements for operating cleanrooms and associated controlled environments to meet their levels for cleanliness. This cleanroom standard does not specify levels of cleanliness nor the me
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