ISO 14644-14-2016 标准详情
- 标准号:ISO 14644-14-2016
- 中文标题:
- 英文标题:Cleanrooms and associated controlled environments -- Part 14: Assessment of suitability for use of equipment by airborne particle concentration
- 标准类别:国际标准化组织ISO
- 发布日期:
ISO 14644-14:2016 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne par
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