ASTM F110-2000A 由角研磨和染色技术撤回2003标准测试方法的外延和扩散层的厚度在硅
ASTM F110-2000A 标准详情
- 标准号：ASTM F110-2000A
- 中文标题：由角研磨和染色技术撤回2003标准测试方法的外延和扩散层的厚度在硅
- 英文标题：standard test method for thickness of epitaxial or diffused layers in silicon by the angle lapping and staining technique withdrawn 2003
- 标准类别：美国材料与试验协会ASTM
- 发布日期：2000
内容简介
This standard was transferred to SEMI (www.semi.org) May 20031.1 This test method covers a procedure suitable for interlaboratory comparisons of layer thickness. This test method is applicable for layers of any resistivity so long as the layer differ
* 特别声明：资源收集自网络或用户上传，本网站所提供的电子文本仅供参考，请以正式出版物为准。仅供个人标准化学习，研究使用。如有侵权，请及时联系我们！
