ASTM F950-1988(1993) 标准详情
- 标准号：ASTM F950-1988(1993)
- 中文标题：标准测试方法用于测量的机械加工硅片表面的晶体损伤的深度角度抛光和蚀刻缺陷
- 英文标题：standard test method for measuring the depth of crystal damage of a mechanically worked silicon slice surface by angle polishing and defect etching
- 标准类别：美国材料与试验协会ASTM
- 发布日期：
