SEMI F72-2002 标准详情
- 标准号:SEMI F72-2002
- 中文标题:
- 英文标题:Test Method For Auger Electron Spectroscopy (aes) Evaluation Of Oxide Layer Of Wetted Surfaces Of Passivated 316l Stainless Steel Components
- 标准类别:国际半导体设备与材料协会
- 发布日期:
Specifies a test method to characterize the surface composition of passivated 316L stainless steel components being considered for installation into a high-purity gas distribution system.
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